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Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires

Greiner, Felix ; Guttmann, Markus ; Meyer, Pascal ; Schlaak, Helmut F. (2013)
Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires.
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 2013
Creators: Greiner, Felix ; Guttmann, Markus ; Meyer, Pascal ; Schlaak, Helmut F.
Type of entry: Bibliographie
Title: Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires
Language: English
Date: 21 April 2013
Place of Publication: Berlin
Book Title: Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013
Corresponding Links:
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 15 Jul 2013 07:35
Last Modified: 15 Jul 2013 07:35
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