Greiner, Felix ; Guttmann, Markus ; Meyer, Pascal ; Schlaak, Helmut F. (2013):
Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires.
In: Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013, pp. 19-20,
Berlin, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2013 |
| Creators: | Greiner, Felix ; Guttmann, Markus ; Meyer, Pascal ; Schlaak, Helmut F. |
| Title: | Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires |
| Language: | English |
| Book Title: | Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013 |
| Place of Publication: | Berlin |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems |
| Date Deposited: | 15 Jul 2013 07:35 |
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