Peter, D. ; Dalmer, M. ; Lechner, A. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2011):
Maesurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse.
In: J. Micromech. Microeng., 21, pp. 025001. [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2011 |
| Creators: | Peter, D. ; Dalmer, M. ; Lechner, A. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. |
| Title: | Maesurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse |
| Language: | English |
| Journal or Publication Title: | J. Micromech. Microeng. |
| Volume of the journal: | 21 |
| Divisions: | Exzellenzinitiative Exzellenzinitiative > Clusters of Excellence Zentrale Einrichtungen Exzellenzinitiative > Clusters of Excellence > Center of Smart Interfaces (CSI) ?? fb99_csi~fg5 ?? |
| Date Deposited: | 12 Jan 2011 12:34 |
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