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Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve

Schmid, J. ; Töpfer, U. ; Murmann-Biesenecker, H. ; Munz, G. ; Münzenmaier, A. ; Maichl, M. ; Ballas, Ruediger ; Schlaak, Helmut F. ; Steinkopff, T. ; Schuh, C. ; Laurent, M. ; Bödinger, H. ; Hoffmann, M. ; Wagner, S. (2004)
Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve.
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 2004
Creators: Schmid, J. ; Töpfer, U. ; Murmann-Biesenecker, H. ; Munz, G. ; Münzenmaier, A. ; Maichl, M. ; Ballas, Ruediger ; Schlaak, Helmut F. ; Steinkopff, T. ; Schuh, C. ; Laurent, M. ; Bödinger, H. ; Hoffmann, M. ; Wagner, S.
Type of entry: Bibliographie
Title: Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve
Language: English
Date: 2004
Place of Publication: Bremen
Publisher: HVG Hanseatische Veranstaltungs-GmbH
Series: Actuator 2004 : conference proceedings ; 14 - 16 June 2004, Bremen, Germany / 9th International Conference on New Actuators & 3rd International Exhibition on Smart Actuators and Drive Systems. Ed.: Hubert Borgmann.- Bremen : HVG Hanseatische Veranstaltung
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
Date Deposited: 20 Nov 2008 08:22
Last Modified: 19 Apr 2016 07:53
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