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Walther, F. and Davydovskaya, P. and Zucher, S. and Kaiser, M. and Herberg, H. and Gigler, A. M. and Stark, R. W. (2007):
Stability of the hydrophilic behavior of oxygen plasma activated SU-8.
In: Journal of Micromechanics and Microengineering, 17 (3), pp. 524-531. ISSN 0960-1317,
[Article]

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