Walther, Ferdinand ; Drobek, Tanja ; Gigler, Alexander M. ; Hennemeyer, Marc ; Kaiser, Michael ; Herberg, Helmut ; Shimitsu, Tetsuji ; Morfill, Gregor E. ; Stark, Robert W. (2010)
Surface hydrophilization of SU-8 by plasma and wet chemical processes.
In: Surface and Interface Analysis, 42 (12-13)
doi: 10.1002/sia.3515
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