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Surface hydrophilization of SU-8 by plasma and wet chemical processes

Walther, Ferdinand and Drobek, Tanja and Gigler, Alexander M. and Hennemeyer, Marc and Kaiser, Michael and Herberg, Helmut and Shimitsu, Tetsuji and Morfill, Gregor E. and Stark, Robert W. (2010):
Surface hydrophilization of SU-8 by plasma and wet chemical processes.
In: Surface and Interface Analysis, 42 (12-13), pp. 1735-1744. ISSN 0142-2421,
DOI: 10.1002/sia.3515,
[Article]

Item Type: Article
Erschienen: 2010
Creators: Walther, Ferdinand and Drobek, Tanja and Gigler, Alexander M. and Hennemeyer, Marc and Kaiser, Michael and Herberg, Helmut and Shimitsu, Tetsuji and Morfill, Gregor E. and Stark, Robert W.
Title: Surface hydrophilization of SU-8 by plasma and wet chemical processes
Language: English
Journal or Publication Title: Surface and Interface Analysis
Journal volume: 42
Number: 12-13
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces
DFG-Collaborative Research Centres (incl. Transregio)
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres
Exzellenzinitiative
Exzellenzinitiative > Clusters of Excellence
Zentrale Einrichtungen
Exzellenzinitiative > Clusters of Excellence > Center of Smart Interfaces (CSI)
Date Deposited: 17 Dec 2014 13:02
DOI: 10.1002/sia.3515
Official URL: https://doi.org/10.1002/sia.3515
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