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Walther, Ferdinand and Drobek, Tanja and Gigler, Alexander M. and Hennemeyer, Marc and Kaiser, Michael and Herberg, Helmut and Shimitsu, Tetsuji and Morfill, Gregor E. and Stark, Robert W. (2010):
Surface hydrophilization of SU-8 by plasma and wet chemical processes.
In: Surface and Interface Analysis, 42 (12-13), pp. 1735-1744. ISSN 0142-2421,
DOI: 10.1002/sia.3515,

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