TU Darmstadt / ULB / TUbiblio

Browse by Person

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: No Grouping | Item Type | Date | Language
Number of items: 1.

Conference or Workshop Item

Wechsler, K. and Rangelow, I. and Borkowicz, Z. and Durst, F. and Kadinski, L. and Schäfer, M. (1993):
Experimental and Numerical Study of the Effects of Neutral Transport and Chemical Kinetics on Plasma Etching System CF4/Si.
In: Proceedings of International Symposium on Plasma Etching, pp. 909-914, [Conference or Workshop Item]

This list was generated on Sat Dec 14 02:22:17 2019 CET.