Sharma, Akhil ; Verheijen, Marcel A. ; Wu, Longfei ; Karwal, Saurabh ; Vandalon, Vincent ; Knoops, Harm C. M. ; Sundaram, Ravi S. ; Hofmann, Jan P. ; Kessels, W. M. M. (Erwin) ; Bol, Ageeth A. (2018)
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology.
In: Nanoscale, 10 (18)
doi: 10.1039/C8NR02339E
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