Dusciac, Dorin ; Brizé, Virginie ; Chazalviel, Jean-Noël ; Lai, Yun-Feng ; Roussel, Hervé ; Blonkowski, Serge ; Schafranek, Robert ; Klein, Andreas ; Henry de Villeneuve, Catherine ; Allongue, Philippe ; Ozanam, François ; Dubourdieu, Catherine (2012)
Organic Grafting on Si for Interfacial SiO2 Growth Inhibition During Chemical Vapor Deposition of HfO2.
In: Chemistry of Materials, 24 (16)
doi: 10.1021/cm301247v
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