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Flege, S. and Hatada, R. and Derepa, A. and Dietz, C. and Ensinger, W. and Baba, K. (2017):
Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition.
In: Review of Scientific Instruments, 88 (9), AIP Publications, pp. 096106, ISSN 0034-6748,
DOI: 10.1063/1.4995080,
[Online-Edition: https://doi.org/10.1063/1.4995080],
[Article]
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