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Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition

Flege, S. and Hatada, R. and Derepa, A. and Dietz, C. and Ensinger, W. and Baba, K. :
Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition.
[Online-Edition: https://doi.org/10.1063/1.4995080]
In: Review of Scientific Instruments, 88 (9) 096106. ISSN 0034-6748
[Article] , (2017)

Official URL: https://doi.org/10.1063/1.4995080

Abstract

A sample holder with a large open area offers several benefits when used in the process of plasma immersion ion implantation and deposition in which the plasma is generated by a high voltage applied to the sample holder: The ignition voltage of the plasma is lower, and the deposition rate can be several times higher than in the case of a normal plate-like holder. There is a more pronounced edge effect regarding the film thickness. Other film properties are also affected; for diamond-like carbon films, the film structure exhibits more disorder. The hardness of the samples is similar, with the surfaces of the samples being very smooth.

Item Type: Article
Erschienen: 2017
Creators: Flege, S. and Hatada, R. and Derepa, A. and Dietz, C. and Ensinger, W. and Baba, K.
Title: Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition
Language: English
Abstract:

A sample holder with a large open area offers several benefits when used in the process of plasma immersion ion implantation and deposition in which the plasma is generated by a high voltage applied to the sample holder: The ignition voltage of the plasma is lower, and the deposition rate can be several times higher than in the case of a normal plate-like holder. There is a more pronounced edge effect regarding the film thickness. Other film properties are also affected; for diamond-like carbon films, the film structure exhibits more disorder. The hardness of the samples is similar, with the surfaces of the samples being very smooth.

Journal or Publication Title: Review of Scientific Instruments
Volume: 88
Number: 9
Publisher: AIP Publications
Uncontrolled Keywords: Etching, Thin films, Analytical chemistry, Carbon based materials, Ceramics
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces
Date Deposited: 28 Dec 2017 12:03
DOI: 10.1063/1.4995080
Official URL: https://doi.org/10.1063/1.4995080
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