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Number of items: 3.

Berberich, Stephan (2000):
SiC Processing technology for fabricating MOSFET devices and micromachined condenser microphones.
Aachen, Shaker, TU Darmstadt, [Ph.D. Thesis]

Berberich, Stephan and Godignon, P. and Millan, J. and Planson, D. and Hartnagel, H. L. and Senses, A. (1999):
Electrical characterisation of MNOS devices on p-type 6H-SiC.
8, In: Diamond and related materials, pp. 305-308, [Article]

Berberich, Stephan and Godignon, P. and Morvan, E. and Fonseca, L. and Millan, J. and Hartnagel, H. L. (1999):
Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC.
In: Workshop on Dielectrics <10, 1999, Barcelona>: Proceedings, [Conference or Workshop Item]

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