TU Darmstadt / ULB / TUbiblio

SiC Processing technology for fabricating MOSFET devices and micromachined condenser microphones

Berberich, Stephan (2000):
SiC Processing technology for fabricating MOSFET devices and micromachined condenser microphones.
Aachen, Shaker, TU Darmstadt, [Ph.D. Thesis]

Item Type: Ph.D. Thesis
Erschienen: 2000
Creators: Berberich, Stephan
Title: SiC Processing technology for fabricating MOSFET devices and micromachined condenser microphones
Language: English
Place of Publication: Aachen
Publisher: Shaker
Collation: XVIII,152 S.
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 15:54
License: [undefiniert]
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)

View Item View Item