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Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC

Berberich, Stephan and Godignon, P. and Morvan, E. and Fonseca, L. and Millan, J. and Hartnagel, H. L. (1999):
Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC.
In: Workshop on Dielectrics <10, 1999, Barcelona>: Proceedings, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Berberich, Stephan and Godignon, P. and Morvan, E. and Fonseca, L. and Millan, J. and Hartnagel, H. L.
Title: Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC
Language: English
Series Name: Workshop on Dielectrics <10, 1999, Barcelona>: Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:22
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