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Self-aligned Fabrication Process for Pd-Contacted and PMMA-Passivated Carbon Nanotube Field-Effect Transistors

Rispal, Lorraine and Yang, Hongyu and Heller, Rudolf and Hess, Gisela and Tzschöckel, Gerhard and Schwalke, Udo (2007):
Self-aligned Fabrication Process for Pd-Contacted and PMMA-Passivated Carbon Nanotube Field-Effect Transistors.
In: 2007 International Conference on Solid State Devices and Materials (SSDM), Tsukuba, Japan, 18.-21.09.2007, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2007
Creators: Rispal, Lorraine and Yang, Hongyu and Heller, Rudolf and Hess, Gisela and Tzschöckel, Gerhard and Schwalke, Udo
Title: Self-aligned Fabrication Process for Pd-Contacted and PMMA-Passivated Carbon Nanotube Field-Effect Transistors
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Event Title: 2007 International Conference on Solid State Devices and Materials (SSDM)
Event Location: Tsukuba, Japan
Event Dates: 18.-21.09.2007
Date Deposited: 28 Jun 2011 06:49
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