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Klemberg-Sapieha, J. E. ; Martinu, L. ; Wertheimer, M. R. ; Günther, P. ; Schellin, Ralf ; Thielemann, C. ; Sessler, G.M. (1996)
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of Vacuum Science and Technology A, 14 (5)
doi: 10.1116/1.580199
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