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Plasma deposition of low-stress electret films on electroacoustic and solar cell application

Klemberg-Sapieha, J. (1996):
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of vacuum science and technology. A 14 (1996), No. 5, S. 2745-2780, [Article]

Item Type: Article
Erschienen: 1996
Creators: Klemberg-Sapieha, J.
Title: Plasma deposition of low-stress electret films on electroacoustic and solar cell application
Language: English
Journal or Publication Title: Journal of vacuum science and technology. A 14 (1996), No. 5, S. 2745-2780
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:02
License: [undefiniert]
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