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Plasma deposition of low-stress electret films on electroacoustic and solar cell application

Klemberg-Sapieha, J. (1996):
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of Vacuum Science and Technology A, 14 (5), pp. 2775-2780. American Vacuum Society (AVS), ISSN 0734-2101,
DOI: 10.1116/1.580199,
[Article]

Item Type: Article
Erschienen: 1996
Creators: Klemberg-Sapieha, J.
Title: Plasma deposition of low-stress electret films on electroacoustic and solar cell application
Language: English
Journal or Publication Title: Journal of Vacuum Science and Technology A
Journal volume: 14
Number: 5
Publisher: American Vacuum Society (AVS)
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:02
DOI: 10.1116/1.580199
License: [undefiniert]
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