1995

Steinmann, Ralf ; Friemann, Harald ; Prescher, C. ; Schellin, Ralf (1995)
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
In: Sensors and Actuators A : Physical, 48 (1)
doi: 10.1016/0924-4247(95)00849-7
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