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Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials

Steinmann, Ralf and Friemann, and Prescher, and Schellin, :
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
In: Sensors and actuators. A48 (1995), S. 37-46
[Article] , (1995)

Item Type: Article
Erschienen: 1995
Creators: Steinmann, Ralf and Friemann, and Prescher, and Schellin,
Title: Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials
Language: English
Journal or Publication Title: Sensors and actuators. A48 (1995), S. 37-46
Divisions: 13 Fachbereich Bau- und Umweltingenieurwissenschaften
Date Deposited: 19 Nov 2008 15:57
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