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Ionescu, E. and Martinez Crespiera, S. and Schlosser, M. and Flittner, K. and Schlaak, Helmut F. and Riedel, R. (2011):
Herstellung Silicumoxycarbid-basierter mikrostrukturierter Bauteile mittels Photolithographie- und Soft Lithographie-Verfahren.
In: Mikrosystemtechnik Kongress 2011, Darmstadt, 10. - 12.10.2011, [Conference or Workshop Item]

This list was generated on Tue Aug 20 00:25:44 2019 CEST.