Artikel

Durst, F. ; Galjukov, A. ; Makarov, Y. ; Schäfer, Michael ; Voinovich, P. ; Zhmakin, A.
Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
In: Simulation of Semiconductor Devices and Processes, 6
Artikel, Bibliographie

Kadinski, L. ; Makarov, Y. ; Schäfer, Michael ; Vasiliev, M. G. ; Yuferev, V. S. (1995)
Development of advanced mathematical models for numerical calculations of radiative heat transfer in metalorganic chemical vapour deposition reactors.
In: Journal of Crystal Growth, 146
Artikel, Bibliographie

Hofmann, D. ; Heinze, M. ; Winnacker, A. ; Durst, F. ; Kadinski, L. ; Makarov, Y. ; Schäfer, Michael (1995)
On the Sublimation Growth of SiC Bulk Crystals: Development of a Numerical Process Model.
In: Journal of Crystal Growth, 146
Artikel, Bibliographie