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Lukes, Sarah J. and Lämmle, David and Dickensheets, David L. Schenk, Harald (ed.) SPIE (Corporate Creator) (2010):
Surface micro-machined SU-8 2002 membrane mirrors for focus control.
In: Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940E ,
San Francisco, California, San Francisco, California, United States, 25.–27. Januar 2010, [Conference or Workshop Item]

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