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Surface micro-machined SU-8 2002 membrane mirrors for focus control

Lukes, Sarah J. and Lämmle, David and Dickensheets, David L. Schenk, Harald (ed.) SPIE (Corporate Creator) (2010):
Surface micro-machined SU-8 2002 membrane mirrors for focus control.
In: Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940E ,
San Francisco, California, San Francisco, California, United States, 25.–27. Januar 2010, [Conference or Workshop Item]

Abstract

We have built 1 mm circular and 1 mm × 1.4 mm elliptical surface micro-machined SU-8 2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm thick with gold as the reflective coating on their surfaces. Three annular electrodes were used for electrostatic actuation. Stable deflection was observed up to 6.8 μm for a 1 mm × 1.4 mm elliptical mirror with an air gap of 14 μm. The frequency response of the membrane exhibited a 3 dB frequency larger than 10 kHz.

Item Type: Conference or Workshop Item
Erschienen: 2010
Editors: Schenk, Harald
Creators: Lukes, Sarah J. and Lämmle, David and Dickensheets, David L.
Title: Surface micro-machined SU-8 2002 membrane mirrors for focus control
Language: English
Abstract:

We have built 1 mm circular and 1 mm × 1.4 mm elliptical surface micro-machined SU-8 2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm thick with gold as the reflective coating on their surfaces. Three annular electrodes were used for electrostatic actuation. Stable deflection was observed up to 6.8 μm for a 1 mm × 1.4 mm elliptical mirror with an air gap of 14 μm. The frequency response of the membrane exhibited a 3 dB frequency larger than 10 kHz.

Title of Book: Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940E
Place of Publication: San Francisco, California
Divisions: Study Areas
Event Location: San Francisco, California, United States
Event Dates: 25.–27. Januar 2010
Date Deposited: 02 Apr 2015 15:45
Additional Information:

Author Affiliations: Sarah J. Lukes, David L. Dickensheets: Montana State Univ. (USA)

David Lämmle: Albert-Ludwigs-Univ. Freiburg (Germany)

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