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2011

Peter, Daniel ; Dalmer, Michael ; Lechner, Alfred ; Gigler, Alexander M. ; Stark, Robert W. ; Bensch, Wolfgang (2011):
Measurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse.
In: Journal of Micromechanics and Microengineering, 21 (2), ISSN 0960-1317,
[Article]

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