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Dehé, Alfons ; Pavlidis, ; Hong, ; Hartnagel, (1997)
InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology.
In: IEEE Transactions on Electron Devices, 44 (7)
Article

Dehé, Alfons ; Hartnagel, ; Pavlidis, ; Hong, ; Kuphal, (1996)
Properties of InGaAs/InP thermoelectric and surface bulk micromachined infrared sensors.
In: Applied physics letters. 69 (1996), S. 3039-3041
Article

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