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InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology

Dehé, Alfons and Pavlidis, and Hong, and Hartnagel, (1997):
InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology.
In: IEEE Transactions on electron devices. 44 (1997), 6, S. 1193-1199, [Article]

Item Type: Article
Erschienen: 1997
Creators: Dehé, Alfons and Pavlidis, and Hong, and Hartnagel,
Title: InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology
Language: German
Journal or Publication Title: IEEE Transactions on electron devices. 44 (1997), 6, S. 1193-1199
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:04
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