Artikel

Rein, M. H. ; Hohmann, M. V. ; Thøgersen, A. ; Mayandi, J. ; Holt, A. O. ; Klein, Andreas ; Monakhov, E. V. (2013)
An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate.
In: Applied Physics Letters, 102 (2)
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