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An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate

Rein, M. H. and Hohmann, M. V. and Tho̸gersen, A. and Mayandi, J. and Holt, A. O. and Klein, Andreas and Monakhov, E. V. (2013):
An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate.
102, In: Applied Physics Letters, (2), pp. 021606, ISSN 00036951, [Online-Edition: http://dx.doi.org/10.1063/1.4774404],
[Article]

Abstract

The interface between indium tin oxide and p-type silicon is studied by in situ X-ray photoelectron spectroscopy (XPS). This is done by performing XPS without breaking vacuum after deposition of ultrathin layers in sequences. Elemental tin and indium are shown to be present at the interface, both after 2 and 10 s of deposition. In addition, the silicon oxide layer at the interface is shown to be composed of mainly silicon suboxides rather than silicon dioxide.

Item Type: Article
Erschienen: 2013
Creators: Rein, M. H. and Hohmann, M. V. and Tho̸gersen, A. and Mayandi, J. and Holt, A. O. and Klein, Andreas and Monakhov, E. V.
Title: An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate
Language: English
Abstract:

The interface between indium tin oxide and p-type silicon is studied by in situ X-ray photoelectron spectroscopy (XPS). This is done by performing XPS without breaking vacuum after deposition of ultrathin layers in sequences. Elemental tin and indium are shown to be present at the interface, both after 2 and 10 s of deposition. In addition, the silicon oxide layer at the interface is shown to be composed of mainly silicon suboxides rather than silicon dioxide.

Journal or Publication Title: Applied Physics Letters
Volume: 102
Number: 2
Uncontrolled Keywords: indium compounds, semiconductor growth, semiconductor materials, semiconductor thin films, sputter deposition, X-ray photoelectron spectra
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties > Subproject D3: Function and fatigue of oxide electrodes in organic light emitting diodes
11 Department of Materials and Earth Sciences > Material Science
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue > D - Component properties
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres > CRC 595: Electrical fatigue
11 Department of Materials and Earth Sciences
Zentrale Einrichtungen
DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres
DFG-Collaborative Research Centres (incl. Transregio)
Date Deposited: 16 Aug 2013 13:13
Official URL: http://dx.doi.org/10.1063/1.4774404
Additional Information:

SFB 595 D3

Identification Number: doi:10.1063/1.4774404
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