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Rein, M. H. and Hohmann, M. V. and Tho̸gersen, A. and Mayandi, J. and Holt, A. O. and Klein, Andreas and Monakhov, E. V. (2013):
An in situ x-ray photoelectron spectroscopy study of the initial stages of rf magnetron sputter deposition of indium tin oxide on p-type Si substrate.
In: Applied Physics Letters, pp. 021606, 102, (2), ISSN 00036951,
[Online-Edition: http://dx.doi.org/10.1063/1.4774404],
[Article]

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