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Ensinger, W. ; Volz, K. ; Galonska, M. ; Gabor, Ch. ; Klein, H. (2002)
The multi-aperture hollow target: a method for determining ion incidence angles in plasma immersion ion implantation.
In: Surface & coatings technology, 156 (1-3)
doi: 10.1016/S0257-8972(02)00129-9
Article, Bibliographie

Galonska, M. ; Gabor, Ch. ; Thomae, R. W. ; Klein, H. ; Volz, K. ; Ensinger, W. (2001)
Determination of ion incidence angles in plasma immersion ion implantation by means of a hollow multi-aperture target.
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, (175-177)
doi: 10.1016/S0168-583X(00)00653-4
Article, Bibliographie

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