Deutsch

Bergunde, T. ; Dauelsberg, M. ; Egorov, Yu ; Kadinski, L. ; Makarov, Yu N. ; Schäfer, M. ; Strauch, G. ; Weyers, M. (1995)
Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor.
In: Simulation of Semiconductor Devices and Processes, 6
Artikel, Bibliographie