Pfeiffer, Joachim ; Riemenschneider, R. ; Mutamba, K. ; Peerlings, J. ; Afshar, B. E. ; Baaser, Herbert ; Grunert, D. ; Meissner, P. ; Hartnagel, H. L. (1999):
Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications.
In: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383, [Conference or Workshop Item]