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Pfeiffer, Joachim and Riemenschneider, R. and Mutamba, K. and Peerlings, J. and Afshar, B. E. and Baaser, Herbert and Grunert, D. and Meissner, P. and Hartnagel, H. L.
:
Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications.
In: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383
.
[Conference or Workshop Item]
, (1999)
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