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Pfeiffer, Joachim ; Riemenschneider, R. ; Mutamba, K. ; Peerlings, J. ; Afshar, B. E. ; Baaser, Herbert ; Grunert, D. ; Meissner, P. ; Hartnagel, H. L. :
Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications.
In: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383 .
[Konferenz- oder Workshop-Beitrag] , (1999)