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Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications

Pfeiffer, Joachim and Riemenschneider, R. and Mutamba, K. and Peerlings, J. and Afshar, B. E. and Baaser, Herbert and Grunert, D. and Meissner, P. and Hartnagel, H. L. (1999):
Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications.
In: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Pfeiffer, Joachim and Riemenschneider, R. and Mutamba, K. and Peerlings, J. and Afshar, B. E. and Baaser, Herbert and Grunert, D. and Meissner, P. and Hartnagel, H. L.
Title: Indium phosphide based bulked micromachining technology for micromechanically tunable WDM filter applications
Language: English
Series Name: TRANSDUCERS'99 <1999, Sendai, Japan>: Proceedings. S. 380-383
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:22
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