Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K. (2016)
Use of a nanostructured surface coating to achieve higher sputter rates.
In: Materials Letters, 164
Article
Abstract
A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved.
| Item Type: | Article |
|---|---|
| Erschienen: | 2016 |
| Creators: | Flege, S. ; Hatada, R. ; Kaiser, T. ; Muench, F. ; Cherkashinin, G. ; Schwöbel, A. ; Ensinger, W. ; Baba, K. |
| Type of entry: | Bibliographie |
| Title: | Use of a nanostructured surface coating to achieve higher sputter rates |
| Language: | English |
| Date: | 1 February 2016 |
| Journal or Publication Title: | Materials Letters |
| Volume of the journal: | 164 |
| URL / URN: | http://dx.doi.org/10.1016/j.matlet.2015.11.059 |
| Abstract: | A method is presented which leads to a higher sputter rate as compared to the sputtering of the surface of a bulk sample under the same sputtering conditions: the target is coated beforehand by a separate process to produce a nanostructured film on its surface. In the case of silver, the sputter yield under ion bombardment is 1.7 times higher. If the ions for the bombardment are generated by a voltage applied to the sample, then improvements up to a factor of five can be realized. (C) 2015 Elsevier B.V. All rights reserved. |
| Uncontrolled Keywords: | Sputtering, Nanostructures, Thin films |
| Identification Number: | doi:10.1016/j.matlet.2015.11.059 |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science > Surface Science |
| Date Deposited: | 06 Jun 2016 11:23 |
| Last Modified: | 11 Jul 2016 06:27 |
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