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High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension

Greiner, Felix ; Schlaak, Helmut F. (2012)
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension.
In: Microsystem Technologies
doi: 10.1007/s00542-012-1659-x
Article, Bibliographie

Item Type: Article
Erschienen: 2012
Creators: Greiner, Felix ; Schlaak, Helmut F.
Type of entry: Bibliographie
Title: High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension
Language: English
Date: 13 September 2012
Publisher: Springer Verlag
Journal or Publication Title: Microsystem Technologies
DOI: 10.1007/s00542-012-1659-x
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 19 Sep 2012 06:46
Last Modified: 05 Mar 2013 10:02
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