Greiner, Felix ; Schlaak, Helmut F. (2012):
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension.
In: Microsystem Technologies, Springer Verlag, ISSN 1432-1858,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 2012 |
| Creators: | Greiner, Felix ; Schlaak, Helmut F. |
| Title: | High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension |
| Language: | English |
| Journal or Publication Title: | Microsystem Technologies |
| Publisher: | Springer Verlag |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems |
| Date Deposited: | 19 Sep 2012 06:46 |
| URL / URN: | http://www.springerlink.com/content/2g836j7p646t7480/abstrac... |
| Identification Number: | doi:10.1007/s00542-012-1659-x |
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