Greiner, Felix ; Schlaak, Helmut F. (2012):
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
In: Book of Abstracts on 4th International Target Fabrication Workshop, p. 69,
Mainz, [Conference or Workshop Item]
URL / URN: http://targetfabrication.com/index.html
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2012 |
| Creators: | Greiner, Felix ; Schlaak, Helmut F. |
| Title: | MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets |
| Language: | English |
| Book Title: | Book of Abstracts on 4th International Target Fabrication Workshop |
| Place of Publication: | Mainz |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems |
| Date Deposited: | 04 Sep 2012 13:13 |
| URL / URN: | http://targetfabrication.com/index.html |
| PPN: | |
| Corresponding Links: | |
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