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Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated

Zhou, Y. ; Yan, X. ; Kroke, E. ; Riedel, R. ; Probst, D. ; Thissen, A. ; Hauser, R. ; Ahles, Marcus ; Seggern, Heinz von (2006)
Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated.
In: Materialwissenschaft und Werkstofftechnik, 37
Article, Bibliographie

Item Type: Article
Erschienen: 2006
Creators: Zhou, Y. ; Yan, X. ; Kroke, E. ; Riedel, R. ; Probst, D. ; Thissen, A. ; Hauser, R. ; Ahles, Marcus ; Seggern, Heinz von
Type of entry: Bibliographie
Title: Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated
Language: English
Date: 2006
Journal or Publication Title: Materialwissenschaft und Werkstofftechnik
Volume of the journal: 37
Divisions: 11 Department of Materials and Earth Sciences
Date Deposited: 20 Nov 2008 08:25
Last Modified: 13 Aug 2021 14:08
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