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Micromachined pressure sensors with AlGaAs/GaAs- and InAs/AlSb/GaSb-resonant tunneling diodes

Mutamba, Kabula ; Sigurdardottir, A. ; Vogt, Alexander ; Pfeiffer, J. ; Behner, U. ; Di Carlo, A. ; Hartnagel, H. L. (1999):
Micromachined pressure sensors with AlGaAs/GaAs- and InAs/AlSb/GaSb-resonant tunneling diodes.
In: Annual Device Research Conference <57, 1999, Santa Barbara, Calif.>: Digest, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Mutamba, Kabula ; Sigurdardottir, A. ; Vogt, Alexander ; Pfeiffer, J. ; Behner, U. ; Di Carlo, A. ; Hartnagel, H. L.
Title: Micromachined pressure sensors with AlGaAs/GaAs- and InAs/AlSb/GaSb-resonant tunneling diodes
Language: English
Series: Annual Device Research Conference <57, 1999, Santa Barbara, Calif.>: Digest
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:22
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