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Schlaak, Helmut F. and Voit, M. (2000):
Fabrication technologies and economic aspects for components in microtechnology.
Berlin, VDE-Verl., In: Microtec 2000: VDE World Microtechnologies Congress <2000, Hannover>. - Berlin: VDE-Verl., 2000. S. 649-653, [Conference or Workshop Item]

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