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Fabrication technologies and economic aspects for components in microtechnology

Schlaak, Helmut F. and Voit, M. (2000):
Fabrication technologies and economic aspects for components in microtechnology.
Berlin, VDE-Verl., In: Microtec 2000: VDE World Microtechnologies Congress <2000, Hannover>. - Berlin: VDE-Verl., 2000. S. 649-653, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2000
Creators: Schlaak, Helmut F. and Voit, M.
Title: Fabrication technologies and economic aspects for components in microtechnology
Language: English
Series Name: Microtec 2000: VDE World Microtechnologies Congress <2000, Hannover>. - Berlin: VDE-Verl., 2000. S. 649-653
Place of Publication: Berlin
Publisher: VDE-Verl.
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 19 Nov 2008 16:25
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