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Article

Volz, K. and Kiuchi, M. and Okumura, M. and Ensinger, W. (2000):
C–SiC–Si gradient films formed on silicon by ion beam assisted deposition at room temperature.
In: Surface and Coatings Technology, Elsevier, pp. 274-279, (128-129), ISSN 02578972,
[Online-Edition: http://dx.doi.org/10.1016/S0257-8972(00)00604-6],
[Article]

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