Merbeler, Fabian (2024)
Ultra-Low-Voltage CMUTs and Innovative Acoustic Coupling for Touch and Fill Level Sensing.
Technische Universität Darmstadt
doi: 10.26083/tuprints-00027634
Dissertation, Erstveröffentlichung, Verlagsversion

Merbeler, Fabian ; Wismath, Sonja ; Haubold, Marco ; Bretthauer, Christian ; Kupnik, Mario (2022)
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates.
In: Micromachines, 13 (5)
doi: 10.3390/mi13050676
Artikel, Bibliographie