Ensinger, Wolfgang ; Flege, Stefan ; Hatada, Ruriko ; Ayata, Sevda ; Matsutani, Takaomi ; Baba, Koumei (2013)
Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target.
In: Transactions of the Materials Research Society of Japan, 38 (1)
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