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Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target

Ensinger, Wolfgang and Flege, Stefan and Hatada, Ruriko and Ayata, Sevda and Matsutani, Takaomi and Baba, Koumei (2013):
Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target.
In: Transactions of the Materials Research Society of Japan, The Materials Research Society of Japan, pp. 97-100, 38, (1), [Article]

Item Type: Article
Erschienen: 2013
Creators: Ensinger, Wolfgang and Flege, Stefan and Hatada, Ruriko and Ayata, Sevda and Matsutani, Takaomi and Baba, Koumei
Title: Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target
Language: English
Journal or Publication Title: Transactions of the Materials Research Society of Japan
Volume: 38
Number: 1
Publisher: The Materials Research Society of Japan
Divisions: 11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences
Date Deposited: 15 May 2013 07:52
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