Ruff, Philip and Carrillo-Solano, Mercedes and Ulrich, Nils and Hadley, Andrea and Kluth, Patrick and Toimil-Molares, Maria Eugenia and Trautmann, Christina and Hess, Christian (2018):
Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation.
In: Zeitschrift für Physikalische Chemie, Ahead of Print, 232 (7-8), pp. 1147-1171. De Gruyter, ISSN 2196-7156,
DOI: 10.1515/zpch-2017-1058,
[Article]