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Ruff, Philip and Carrillo-Solano, Mercedes and Ulrich, Nils and Hadley, Andrea and Kluth, Patrick and Toimil-Molares, Maria Eugenia and Trautmann, Christina and Hess, Christian :
Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation.
[Online-Edition: https://doi.org/10.1515/zpch-2017-1058]
In: Zeitschrift für Physikalische Chemie, Ahead of Print, 232 (7-8) pp. 1147-1171. ISSN 2196-7156
[Article] , (2018)

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