Luan, Xingang ; Gu, Shaomin ; Zhang, Qiqi ; Cheng, Laifei ; Riedel, Ralf (2021)
An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods.
In: Sensors and Actuators A: Physical, 330
doi: 10.1016/j.sna.2021.112824
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