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Luan, Xingang ; Gu, Shaomin ; Zhang, Qiqi ; Cheng, Laifei ; Riedel, Ralf (2021):
An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods.
In: Sensors and Actuators A: Physical, 330, p. 112824. Elsevier, ISSN 0924-4247, e-ISSN 1873-3069,
DOI: 10.1016/j.sna.2021.112824,
[Article]

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