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An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods

Luan, Xingang ; Gu, Shaomin ; Zhang, Qiqi ; Cheng, Laifei ; Riedel, Ralf (2021):
An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods.
In: Sensors and Actuators A: Physical, 330, p. 112824. Elsevier, ISSN 0924-4247, e-ISSN 1873-3069,
DOI: 10.1016/j.sna.2021.112824,
[Article]

Abstract

High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 degrees C, high temperature conductive coatings are required to match with the YCa4O(BO3)(3) (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 degrees C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 degrees C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 degrees C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN.

Item Type: Article
Erschienen: 2021
Creators: Luan, Xingang ; Gu, Shaomin ; Zhang, Qiqi ; Cheng, Laifei ; Riedel, Ralf
Title: An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods
Language: English
Abstract:

High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 degrees C, high temperature conductive coatings are required to match with the YCa4O(BO3)(3) (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 degrees C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 degrees C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 degrees C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN.

Journal or Publication Title: Sensors and Actuators A: Physical
Journal volume: 330
Publisher: Elsevier
Uncontrolled Keywords: SAW sensor, Conductive coating, SiBCN ceramic, PDC, CVD High-Temperature, Mechanical Properties, Electrodes
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
Date Deposited: 21 Jul 2021 09:12
DOI: 10.1016/j.sna.2021.112824
Additional Information:

International Scientific and Technological Cooperation Projects in Shaanxi Province Key RD Program, Grant Number 2020KW-035

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