Luan, Xingang ; Gu, Shaomin ; Zhang, Qiqi ; Cheng, Laifei ; Riedel, Ralf (2021)
An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods.
In: Sensors and Actuators A: Physical, 330
doi: 10.1016/j.sna.2021.112824
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 degrees C, high temperature conductive coatings are required to match with the YCa4O(BO3)(3) (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 degrees C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 degrees C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 degrees C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2021 |
| Autor(en): | Luan, Xingang ; Gu, Shaomin ; Zhang, Qiqi ; Cheng, Laifei ; Riedel, Ralf |
| Art des Eintrags: | Bibliographie |
| Titel: | An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods |
| Sprache: | Englisch |
| Publikationsjahr: | 15 Oktober 2021 |
| Verlag: | Elsevier |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Sensors and Actuators A: Physical |
| Jahrgang/Volume einer Zeitschrift: | 330 |
| DOI: | 10.1016/j.sna.2021.112824 |
| Kurzbeschreibung (Abstract): | High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 degrees C, high temperature conductive coatings are required to match with the YCa4O(BO3)(3) (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 degrees C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 degrees C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 degrees C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN. |
| Freie Schlagworte: | SAW sensor, Conductive coating, SiBCN ceramic, PDC, CVD High-Temperature, Mechanical Properties, Electrodes |
| Zusätzliche Informationen: | International Scientific and Technological Cooperation Projects in Shaanxi Province Key RD Program, Grant Number 2020KW-035 |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe |
| Hinterlegungsdatum: | 21 Jul 2021 09:12 |
| Letzte Änderung: | 21 Jul 2021 09:12 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Frage zum Eintrag |
Optionen (nur für Redakteure)
 |
Redaktionelle Details anzeigen |
Drucken
Impressum